Project Partner

MESA+ Institute -
University of Twente

We develop ground-breaking nanotechnology that contributes to solutions for actual societal challenges.

Driven by our fascination with the smallest possible scale, our researchers build materials and components that provide sustainable and unexpected solutions to many of these challenges. We offer top talent the team spirit and infrastructure that enables them to flourish. We realise that in order to make this possible and to maintain and strengthen our ‘cutting edge’ position, we have the responsibility to invest in young talent.

Research at MESA+ focuses on societal challenges in four application areas: Health, AgriFood & Water, Security, and Energy & Sustainability. With our research, we contribute to a fair, sustainable and digital society. Researchers of the MESA+ Institute combine their strengths in the following Centres of Expertise: Brain-Inspired Nano Systems (BRAINS), Molecules Centre, Organ-on-Chip Centre Twente, Quant Centre, Solar Centre, Twente Centre for Advanced Battery Technology, and the PIEZO MEMS Centre.

The Inorganic materials science group (Koster and Rijnders) has expertise in the growth of many different (artificial) complex (oxide) materials using pulsed laser deposition (PLD) and in situ diagnostic tools such as reflection high energy electron diffraction (RHEED) and is part of the PIEZO MEMS Centre.

Role in the project

Growth and characterization of PLD grown PZT and ScAlN thin films optimized for the performance requested by the project.

Key contribution to the project

In task T2.2.1: Thin film development of piezoelectric materials there will be a focus to combine the thin film technologies of the partners to set up two platforms for the development of new piezoelectric thin films to increase the performance of acoustic transducers and improve the usability and commercialization capabilities of the technologies.

Process platform 1 – CMOS compatible AlScN based thin films.

Process platform 2 – PZT based thin films:
UTwente will develop and characterize AlScN and PZT heterostructures grown by pulsed laser deposition on (membrane) platforms. UTwente will investigate various (thermal) strain compensating buffer layers and explore low temperature (< 450C) deposition schemes while maintaining piezoelectric performance.


Prof. Gertjan Koster [orcid]

Prof. A.J.H.M. Rijnders [website]


University of Twente
Faculty of Science and Technology
Nanolab 2001
P.O. Box 217
7500 AE Enschede