Solmates uses its own 100 m2 cleanroom which contains PLD systems, including the HVM prototype reactor. These systems are used for process development of the advanced thin film piezo materials. First line analytical equipment is also present in this cleanroom; thin film stress measurement tools, optical spectrometer, microscopes and 4-point electrical probe setup.
Role in the project
Hardware and process, development to improve the current state-of-the-art Pulsed Laser Deposition (PLD) technology of Solmates, for deposition of piezoelectric thin films that will be integrated in the pMICs and pMUTs.
Key contribution to the project
Solmates will develop the thin film technology to grow the ScAlN piezo films by PLD and provide the piezoelectric thin film materials for the Piezoelectric Microphone (PMIC) for the hearing aid applications use case.
Solmates BV
Auke Vleerstraat 3
7521 PE Enschede
NETHERLANDS
www.solmates-pld.com